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Description
The trend to produce smaller and smaller device features began in 1958 with the invention of the first integrated circuit, in order to incorporate more complex functionality into the integrated circuit. Smaller device features also allow for the incorporation of more complex functionality into the integrated circuit while also improving performance and reducing power consumption and heat production in the circuit. A critical aspect in the construction of any integrated circuit is the electrical isolation of the circuit elements from each other. Without sufficient isolation, the elements could communicate electrically with each other in unintended ways, ruining device performance. Smaller device features reduce the distance between circuit elements, exacerbating isolation problems, as well as increasing sensitivity of the devices to minute surface imperfections in the wafer.
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Standard CMOS Epi
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